Produção e caracterização de membranas suspensas de grafeno

Abstract

In this work, we have used a graphene grown by chemical vapor deposition (CVD) integrated in a device architecture to create suspended graphene membranes. We have characterized these membranes by atomic force microscopy (AFM) and force spectroscopy (FS) measurements. This device, named platform, consists of a Silicon substrate with a thin layer of silicon nitride. The platform architecture allows the suspended graphene membranes to interact with liquids via microuidic buried channels. The fabrication of the device consists of various steps of optical lithography and clean room processing. Thus, we present in detail the fabrication procedure of the platform as well as a brief introduction of graphene synthesis by CVD, optical lithography and AFM and FS techniques. Finally, we also show some preliminary results about the interaction between the suspended membranes of graphene and water, in addition with some preliminary study using the AFM and FS techniques.