Design criteria of a thermal mass flow sensor for aircraft air data applications
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Universidade Federal de Minas Gerais
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The operating environment of aircraft air-data
sensors is extremely aggressive with a wide
temperature and humidity variation, suspension
particles, icing and etc. The Pitot tube is widely
used as air-data sensor on aircrafts, which has
had many operational issues reported in the past
decades due to ice-crystal obstruction of its
aperture. The Microelectromechanical Systems
(MEMS) technology associated with Thermal
Mass Flow Sensors (TMFS) can establish a
reformulation on air-data system
instrumentation, since it is possible to create
micro heaters and thermal sensors on the same
substrate without moving parts, simplifying the
operational requirements compliant to the
aeronautics specifications. Exploring the
simplicity and robustness of MEMS technology,
a TMFS is herein designed according to criteria
that meet aeronautic performance requirements,
selecting adequate dimensions of the various
structures in the sensor and materials compatible
with semiconductor micromachining processes.
This paper also presents the numerical results of
the interaction of a thermal mass flowing through
the integrated heater element of the sensor.
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Embedded Systems, Aerospace systems, Aircraft Navigation, Thermal Mass Flow Sensor, Microelectromechanical Systems, Air Data Systems
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https://www.icas.org/icas_archive/ICAS2018/data/papers/ICAS2018_0609_paper.pdf