Estimação e compensação da influência da temperatura do gás manométrico em um sensor de pressão: um estudo de caso usando sensor piezoresistivo

Abstract

This work is concerned with the need for temperature compensation in a pressure sensor. One motivation for this work is the cheap of pressure sensors as secondary standards instead of a more expensive the Digital Pressure Gauge (DPG). The output of such sensors, however, are influenced by the manometric gas temperature. Therefore, the first goal of this work was to quantify the need for static and dynamic temperature compensation. The second goal was then to actually perform compensation and assess overal performance. In order to do so, a special set up was built and large number of dynamic and static tests were carefully performed. A methodology was then defined in order to quantify and compensate for spurious temperature effects. The results discussed in this work suggest that only static compensation of temperature effects are required and that, when accomplished, such a compensation enables the use of relatively cheap pressure sensors as secondary standards.