Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma
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Universidade Federal de Minas Gerais
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Dielectric barrier discharge (DBD) plasma was used to change the wettability of a SU-8 photoresist, reducing the contact angle and improving the surface smoothness. As most polymers, SU-8 has hydrophobic surfaces which prevents the adhesion of biological samples when used to fabricate biochemical sensors. Here, DBD Plasma treatment was conducted over the SU-8 surface, reducing the contact angle from 78° to 12°. The advantage of this treatment is that the SU-8 surface maintains the hydrophilic surface behavior over 24 h time period. DBD plasma modified the SU-8 surface wettability under low temperature variation and does not cause great irregularities on the surface. The highest value of root mean square surface roughness after 10 min exposure was 2.9 ± 0.3 nm.
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Thermodynamic states and processes, Air pollution, Plasma processing, Light sensitive materials, Atomic force microscopy, X-ray photoelectron spectroscopy, Lab-on-a-chip, Chemical elements, Plasma devices, Biosensors, Polymers offer various advantages over silicon technology in order to produce biosensors, not only considering the economic factors, but also the bioavailability, flexibility in microfabrication, and low toxicity. Some biosensor devices are capable to execute multiple functions commonly performed by many technicians in a laboratory, everything in a small substrate. These kinds of biosensors are called lab-on-a-chip devices, and offer portability, high sensibility, fast, and label free analysis, SU-8 is a commonly used epoxy-based negative photoresist. It is designed for micromachining and other microelectronic applications where a thick chemically and thermally stable image is desired
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https://pubs.aip.org/avs/jva/article/36/2/021403/246362/Treatment-of-SU-8-surfaces-using-atmospheric