Treatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma

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dc.creatorJuliana de Novais Schianti
dc.creatorFellype do Nascimento
dc.creatorJhonattan Córdoba Ramírez
dc.creatorMunemasa Machida
dc.creatorLucas Heitzmann Gabrielli
dc.creatorHugo Enrique Hernandez-Figueroa
dc.creatorStanislav Moshkalev
dc.date.accessioned2025-04-25T14:19:21Z
dc.date.accessioned2025-09-09T00:44:45Z
dc.date.available2025-04-25T14:19:21Z
dc.date.issued2018
dc.identifier.doihttps://doi.org/10.1116/1.4999045
dc.identifier.issn0734-2101
dc.identifier.urihttps://hdl.handle.net/1843/81850
dc.languageeng
dc.publisherUniversidade Federal de Minas Gerais
dc.relation.ispartofJournal of vacuum science and technology A
dc.rightsAcesso Restrito
dc.subjectPolímeros
dc.subject.otherThermodynamic states and processes, Air pollution, Plasma processing, Light sensitive materials, Atomic force microscopy, X-ray photoelectron spectroscopy, Lab-on-a-chip, Chemical elements, Plasma devices, Biosensors
dc.subject.otherPolymers offer various advantages over silicon technology in order to produce biosensors, not only considering the economic factors, but also the bioavailability, flexibility in microfabrication, and low toxicity. Some biosensor devices are capable to execute multiple functions commonly performed by many technicians in a laboratory, everything in a small substrate. These kinds of biosensors are called lab-on-a-chip devices, and offer portability, high sensibility, fast, and label free analysis
dc.subject.otherSU-8 is a commonly used epoxy-based negative photoresist. It is designed for micromachining and other microelectronic applications where a thick chemically and thermally stable image is desired
dc.titleTreatment of SU-8 surfaces using atmospheric pressure dielectric barrier discharge plasma
dc.typeArtigo de periódico
local.citation.issue2
local.citation.spage021403
local.citation.volume36
local.description.resumoDielectric barrier discharge (DBD) plasma was used to change the wettability of a SU-8 photoresist, reducing the contact angle and improving the surface smoothness. As most polymers, SU-8 has hydrophobic surfaces which prevents the adhesion of biological samples when used to fabricate biochemical sensors. Here, DBD Plasma treatment was conducted over the SU-8 surface, reducing the contact angle from 78° to 12°. The advantage of this treatment is that the SU-8 surface maintains the hydrophilic surface behavior over 24 h time period. DBD plasma modified the SU-8 surface wettability under low temperature variation and does not cause great irregularities on the surface. The highest value of root mean square surface roughness after 10 min exposure was 2.9 ± 0.3 nm.
local.publisher.countryBrasil
local.publisher.departmentENG - DEPARTAMENTO DE ENGENHARIA ELETRÔNICA
local.publisher.initialsUFMG
local.url.externahttps://pubs.aip.org/avs/jva/article/36/2/021403/246362/Treatment-of-SU-8-surfaces-using-atmospheric

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