Micrometric displacement measurement using CMOS 0.35µm technology Quad-Cell
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Universidade Federal de Minas Gerais
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Precise displacement estimation has high demands on the measurement system, but permits a wide range of applications. This paper presents a new methodology for precise micrometric displacement measurement utilizing a Quad-Cell (QC), Position Sensitive Detector (PSD) realized in a 0.35μm CMOS technology. Experimental results indicate high precision in the range of several micrometers for displacements of up to 2,400μm. Further, extracted curves permit the choice of the best trade-off between precision and maximum measureable displacement.
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Sinais e símbolos, Instrumentos de medição, Circuitos de sinais mistos, Circuitos eletrônicos - Projetos
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Displacement Measurements - Measurement Methodology, CMOS Technology, Photodiode - Laser Beam, Spot Size - Light Beam, Printed Circuit Board, Beam Spot - Spot Position, Polarizing Filter, Mirror Surface, Step Flow, Spot Radius
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https://ieeexplore.ieee.org/document/7598191